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The Enabling MOCVD Solution

G10-AsP

Fully Automated MOCVD for High Volume

Production of GaAs/InP Materials

Cassette-to-Cassette Wafer Handling

  • Fully automated loading of wafers
  • Compatible with current an future wafer sizes 75 mm | 100 mm | 150 mm | 200 mm | optional SMIF port
  • Vacuum cassette elevators for 2 x 25 wafer cassettes
  • Clean environment for lowest defect levels
  • Significant reduction of labor cost – both on operator and expert level

Fully Automated MOCVD for High Volume Production of GaAs/InP Materials

Market Opportunity 

 

G10-AsP

  • Future proof - Compatible with current and future wafer sizes 75 mm | 100 mm | 150 mm | 200 mm | optional SMIF port
  • Highest uniformity and repeatability – throughout production campaigns 
  • Best particle performance in the market at lowest operational cost per good wafer

G10-AsP

 Planetary Reactor®

Your benefits

  • Reduced labor cost, eliminate night shift
  • Up to 10X lower particles, down to 0.1/cm²
     
  • Unsurpassed reproducibility
  • Exceptionally long campaigns
     
  • Best in class yields
  • Highest quality epitaxial layers
     
  • Best Cost of Ownership 
  • Highest throughput of its class 

Our solutions

  • Fully automated processes with Cassette-to-Cassette handling
     
  • Automated chamber etch back
     
  • Planetary technology with single wafer performance
  • Wafer-level control of uniformity and temperature by numerous chamber design innovations
     
  • Largest capacity batch reactor platform for maximized Fab output
  • Unmatched chemical efficiency by novel reactor design innovations

Addressing the tightened requirements of future markets

Best in class single wafer performance – throughout production campaign 

 

Wavelength uniformity for Micro LEDs

F-P Dip uniformity for VCSEL

Ihr Ansprechpartner

Marketing

Vincent Meric

Vice President Marketing

Service

AIXTRON SE (Headquarters)

AIXTRON 24/7 Technical Support Line

AIXTRON Europe

AIXTRON Ltd (UK)

AIXTRON K.K. (Japan)

AIXTRON Korea Co., Ltd.

AIXTRON Taiwan Co., Ltd. (Main Office)

AIXTRON Inc. (USA)

Produkte

Vincent Meric
Vice President Marketing

Karriere

Laura Preinich
Recruiter

Tom Lankes
Talent Acquisition Expert - Ausbildungsleitung

Nachhaltigkeit 

Christoph Pütz
Senior Manager ESG & Sustainability

Unternehmen & Investor Relations

Christian Ludwig
Vice President

Ralf Penner
Senior IR Manager

Forschung & Entwicklung

Prof. Dr. Michael Heuken
Vice President Advanced Technologies

Presse & Öffentlichkeitsarbeit

Ragah Dorenkamp
Director Corporate Communications