V

The Enabling MOCVD Solution

G10-AsP

Fully Automated MOCVD for High Volume

Production of GaAs/InP Materials

Cassette-to-Cassette Wafer Handling

  • Fully automated loading of wafers
  • Compatible with current and future wafer sizes 75 mm | 100 mm | 150 mm | 200 mm | optional SMIF port
  • Vacuum cassette elevators for 2 x 25 wafer cassettes
  • Clean environment for lowest defect levels
  • Significant reduction of labor cost – both on operator and expert level

Fully Automated MOCVD for High Volume Production of GaAs/InP Materials

Market Opportunity 

 

  • Future proof - Compatible with current and future wafer sizes 75 mm | 100 mm | 150 mm | 200 mm | optional SMIF port
  • Highest uniformity and repeatability – throughout production campaigns 
  • Best particle performance in the market at lowest operational cost per good wafer

G10-AsP

 Planetary Reactor®

Your benefits

  • Reduced labor cost, eliminate night shift
  • Up to 10X lower particles, down to 0.1/cm²
     
  • Unsurpassed reproducibility
  • Exceptionally long campaigns
     
  • Best in class yields
  • Highest quality epitaxial layers
     
  • Best Cost of Ownership 
  • Highest throughput of its class 

Our solutions

  • Fully automated processes with Cassette-to-Cassette handling
     
  • Automated chamber etch back
     
  • Planetary technology with single wafer performance
  • Wafer-level control of uniformity and temperature by numerous chamber design innovations
     
  • Largest capacity batch reactor platform for maximized Fab output
  • Unmatched chemical efficiency by novel reactor design innovations

Addressing the tightened requirements of future markets

Best in class single wafer performance – throughout production campaign 

 

Wavelength uniformity for Micro LEDs

F-P Dip uniformity for VCSEL

Broschüre
DOWNLOAD BROCHURE

Ihr Ansprechpartner

Marketing

Vincent Meric

Vice President Marketing

Phone: +49 (0) 2407 9030-2266

Fax: +49 (0) 2407 9030-40

Send e-mail

Back to product overview

Sales

Alan Tai
Taiwan/Singapore

Phone: +886 3 571 2678 ext. 101

E-Mail senden

Christof Sommerhalter
USA

Phone: +1 669-228 ext. 3893

E-Mail senden

Christian Geng
Europe

Phone: +49 (2407) 9030 -135

E-Mail senden

Hisatoshi Hagiwara
Japan

Phone: +81 3-5781-0935 ext. 510

E-Mail senden

Nam Kyu Lee
South Korea

Phone: +82 31 371 ext. 3011

E-Mail senden

Wei (William) Song
China

Phone: +86 2164453226 ext. 101

E-Mail senden

Service

AIXTRON SE (Headquarters)

Phone: +49 (2407) 9030-0

AIXTRON 24/7 Technical Support Line

Phone: +49 (2407) 9030-999

AIXTRON Europe

Phone: +49 (2407) 9030-9037

AIXTRON Ltd (UK)

Phone: +44 (1223) 519-444

AIXTRON K.K. (Japan)

Phone: +81 3 5781 0931

AIXTRON Korea Co., Ltd.

Phone: +82 (31) 371-3000

AIXTRON Taiwan Co., Ltd. (Main Office)

Phone: +886 3 571 2678

AIXTRON Inc. (USA)

Phone: +1 (669) 228-3759

Products

Vincent Meric
Vice President Marketing

Phone: +49 (0) 2407 9030-9022

E-Mail senden

Career

Tom Lankes
Talent Acquisition Expert- Ausbildungsleitung

Phone: +49 (2407) 9030 0

Sustainability

Christoph Pütz
Senior Manager ESG & Sustainability

Phone: +49 (0) 2407 9030-5968

E-Mail senden

Investor Relations

Christian Ludwig
Vice President Investor Relations & Corporate Communications

Phone: +49 (2407) 9030-444

E-Mail senden

Ralf Penner
Senior IR Manager

Phone: +49 (2407) 9030-6153

E-Mail senden

Press & Public Relations

Christian Ludwig
Vice President Investor Relations & Corporate Communications

Phone: +49 (2407) 9030-444

E-Mail senden

Research & Development

Prof. Dr. Michael Heuken
Vice President Advanced Technologies

Phone: +49 (2407) 9030-335

E-Mail senden

Spare Parts

Service/Kundendienst