AIX G5 WW C: Deposition System for Compound Semiconductors :: AIXTRON

DEPOSITION SYSTEM FOR COMPOUND SEMICONDUCTORS

AIX G5 WW C

“Best performance for Next Generation SiC Power Electronics to address Global Mega Trends”

High throughput batch epitaxy with single wafer control - combining best of both worlds.

Key Benefits

Best in class throughput and lowest cost of ownership per wafer
Single wafer performance in batch configuration for excellent epitaxial layer quality
Si fab compatible automation supports SiC power market ramp-up

Product Features

Planetary reactor with hot wafer transfer
Efficient gas utilization in growth chamber
Wafer level temperature control
Cassette-to-cassette wafer handling
Fast epitaxial processing
8x150 mm configuration with single wafer rotation
AutoSat feature for within batch uniformity
SECS-GEM factory interface

AIX G5 WW C - Tool with automated wafer transfer module

Broschüre

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Your contact person

Marketing

Vincent Meric

Vice President Marketing

Phone: +49 (0) 2407 9030-9022

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Sales

Alan Tai
Taiwan/Singapore

Phone: +886 3 571 2678 ext. 101

Christof Sommerhalter
USA

Phone: +1 669-228 ext. 3893

Christian Geng
Europe

Phone: +49 (2407) 9030 -135

Hisatoshi Hagiwara
Japan

Phone: +81 3-5781-0935 ext. 510

Nam Kyu Lee
South Korea

Phone: +82 31 371 ext. 3011

Wei (William) Song
China

Phone: +86 2164453226 ext. 101

Service

AIXTRON SE (Headquarters)

Phone: +49 (2407) 9030-0

AIXTRON 24/7 Technical Support Line

Phone: +49 (2407) 9030-999

AIXTRON Europe

Phone: +49 (2407) 9030-9037

AIXTRON Ltd (UK)

Phone: +44 (1223) 519-444

AIXTRON K.K. (Japan)

Phone: +81 3 5781 0931

AIXTRON Korea Co., Ltd.

Phone: +82 (31) 371-3000

AIXTRON Taiwan Co., Ltd. (Main Office)

Phone: +886 3 571 2678

AIXTRON Inc. (USA)

Phone: +1 (669) 228-3759

Products

Vincent Meric
Vice President Marketing

Phone: +49 (0) 2407 9030-9022

Career

Laura Preinich
Recruiter

Phone: +49 (2407) 9030 0

Tom Lankes
Talent Acquisition Expert- Ausbildungsleitung

Phone: +49 (2407) 9030 0

Sustainability

Christoph Pütz
Senior Manager ESG & Sustainability

Phone: +49 (0) 2407 9030-5968

Investor Relations

Christian Ludwig
Vice President Investor Relations & Corporate Communications

Phone: +49 (2407) 9030-444

Ralf Penner
Senior IR Manager

Phone: +49 (2407) 9030-6153

Press & Public Relations

Christian Ludwig
Vice President Investor Relations & Corporate Communications

Phone: +49 (2407) 9030-444

Research & Development

Prof. Dr. Michael Heuken
Vice President Advanced Technologies

Phone: +49 (2407) 9030-335

Spare Parts

Service/Kundendienst