v 

Deposition Systems for Compound Semiconductors

G10-SiC

150/200 mm high throughput epitaxy for SiC Power Electronics

Dual wafer size batch reactor

G10-SiC

  • 150 mm and 200 mm – dual wafer size capable – safeguard your investment into the future
  • Highest wafer output / m2 in the market
  • Lowest cost / wafer in the market
  • Excellent run-to-run process performance
  • Highly uniform, low defect SiC epitaxy processes for maximum chip yield

G10-SiC

Planetary Reactor® for 9 x 150 mm & 6 x 200 mm

Your benefits

  • Single wafer performance in batch configuration
  • Best in class productivity
  • Best in class epi cost

Our solutions

  • Fully automated wafer loading (C2C)
  • Individual wafer Gas Foil Rotation (GFR)
  • Automated Top side wafer Temperature Control (TTC) for optimized batch processing
  • Largest reactor capacity (9 x 150 mm & 6 x 200 mm)
  • High growth rate SiC processes
  • Hot wafer transfer and fast thermal reactor cycling
  • Best in class wafer throughput per m2 fab space efficacy
  • Low consumable cost per wafer
  • Highest efficiency in gas & power consumption per wafer

AIXTRON SiC application lab services

  • Operation of 4 systems for 150/200 mm SiC process development
  • Full material characterization capabilities supported by Fraunhofer Institute, Germany
  • Customer support through SiC process demonstration/developments and training

G10-SiC: 200 mm uniformity

G10-SiC: 150 mm uniformity

Broschüre
DOWNLOAD BROCHURE

Share

Ihr Ansprechpartner

Marketing

Dr. Frank Wischmeyer

Vice President Silicon Carbide

Phone: +49 (0) 2407 9030-780

Send e-mail

Back to product overview

Sales

Alan Tai
Taiwan/Singapore

Phone: +886 3 571 2678 ext. 101

E-Mail senden

Christof Sommerhalter
USA

Phone: +1 669-228 ext. 3893

E-Mail senden

Christian Geng
Europe

Phone: +49 (2407) 9030 -135

E-Mail senden

Hisatoshi Hagiwara
Japan

Phone: +81 3-5781-0935 ext. 510

E-Mail senden

Nam Kyu Lee
South Korea

Phone: +82 31 371 ext. 3011

E-Mail senden

Wei (William) Song
China

Phone: +86 2164453226 ext. 101

E-Mail senden

Service

AIXTRON SE (Headquarters)

Phone: +49 (2407) 9030-0

AIXTRON 24/7 Technical Support Line

Phone: +49 (2407) 9030-999

AIXTRON Europe

Phone: +49 (2407) 9030-9037

AIXTRON Ltd (UK)

Phone: +44 (1223) 519-444

AIXTRON K.K. (Japan)

Phone: +81 3 5781 0931

AIXTRON Korea Co., Ltd.

Phone: +82 (31) 371-3000

AIXTRON Taiwan Co., Ltd. (Main Office)

Phone: +886 3 571 2678

AIXTRON Inc. (USA)

Phone: +1 (669) 228-3759

Products

Vincent Meric
Vice President Marketing

Phone: +49 (0) 2407 9030-9022

E-Mail senden

Career

Laura Preinich
Recruiter

Phone: +49 (2407) 9030 0

Tom Lankes
Talent Acquisition Expert- Ausbildungsleitung

Phone: +49 (2407) 9030 0

Sustainability

Christoph Pütz
Senior Manager ESG & Sustainability

Phone: +49 (0) 2407 9030-5968

E-Mail senden

Investor Relations

Christian Ludwig
Vice President Investor Relations & Corporate Communications

Phone: +49 (2407) 9030-444

E-Mail senden

Ralf Penner
Senior IR Manager

Phone: +49 (2407) 9030-6153

E-Mail senden

Press & Public Relations

Christian Ludwig
Vice President Investor Relations & Corporate Communications

Phone: +49 (2407) 9030-444

E-Mail senden

Research & Development

Prof. Dr. Michael Heuken
Vice President Advanced Technologies

Phone: +49 (2407) 9030-335

E-Mail senden

Spare Parts

Service/Kundendienst