Deposition Systems for Compound Semiconductors

G10-GaN

150/200 mm high throughput epitaxy

for GaN power & RF applications 

.

Our product for 150/200 mm GaN epitaxy

G10-GaN 

  • Highest wafer/m² fab area
    3 process chamber compact cluster design with
    50 % footprint reduction*

 

  • Best in class device yield

3x on-wafer uniformity improvement*
at lowest particle level for all wafers
(within run, run-to-run, chamber-to-chamber)
 

  • Lowest epi cost/wafer in the market

>25% lower epi cost than any other platform 

Planetary Reactor® 

Your benefits 

  • Highest wafer yield
    Low particle density (~0.1/cm²)
    Excellent uniformity (on-wafer, wafer-to-wafer)

 

 

  • Best in class productivity
    Outstanding reproducibility
    ≥90 % equipment uptime
  • Best in class epi cost
    Highest throughput/m² fab
    Lowest labor & chemical cost 

Our solutions

  • Fully automated wafer handling (C2C)
  • Novel wafer carrier design
  • Individual wafer close loop topside temp. control
  • Individual control of thickness & composition uniformity by 5-flow injector
  • Automated chamber cleaning
  • Long lifetime consumables
  • Smart system with predictive functionalities
  • Advanced chamber-to-chamber matching capabilities
  • Large capacity batch Planetary Reactor®
  • Compact cluster design with 3 process chambers
  • Highest chemical efficiency by 5-flow injector
  • Lowest operator assistance due to 50 wafer capacity on C2C 

The best of both worlds

Single wafer performance at lowest batch processing cost 

 

Composition uniformity 

On-wafer device uniformity (650V application) 

G10-GaN enables seamless process transfer from today‘s tool of record AIX G5+ C

  • Same cassette-to-cassette wafer handling

 

  • „On-board“ calibration and control modes for process matching

 

  • Identical process chamber size and wafer configuration 

High productivity MOCVD solution for 150/200 mm GaN power & RF applications

Market opportunity

GAN MARKET TRENDS

 

FAST CHARGER

Source: https://www.digitalcameraworld.com/buying-guides/best-gan-charger

 

DATA CENTER

Source: https://www.datacenterknowledge.com

 

SOLAR MICRO INVERTER

Source: https://www.solarreviews.com 

Market volume ($M)

Source: Yole Power GaN © 2023 

Global presence 

CHINA
AIXTRON China Ltd.
Phone +86 (21) 6445 3226
Fax +86 (21) 6445 3742
E-Mail chinainfo@aixtron.com

GERMANY
AIXTRON SE
Phone +49 (2407) 9030-0
Fax +49 (2407) 9030-40
E-Mail info@aixtron.com

TAIWAN
AIXTRON Taiwan Co., Ltd.
Phone +886 (3) 571 2678
Fax +886 (3) 571 2738
E-Mail taiwaninfo@aixtron.com

KOREA
AIXTRON Korea CO., Ltd.
Phone +82 (31) 371 3000
Fax +82 (31) 371 3093
E-Mail koreainfo@aixtron.com

USA
AIXTRON Inc.
Phone +1 (669) 228 3759
E-Mail usinfo@aixtron.com

UNITED KINGDOM
AIXTRON Ltd.
Phone +44 (1223) 519 444
Fax +44 (1223) 519 888
E-Mail ukinfo@aixtron.com

JAPAN
AIXTRON K.K.
Phone +81 (3) 5781 0931
Fax +81 (3) 5781 0940
E-Mail japaninfo@aixtron.com

MALAYSIA
AIXTRON Malaysia Sdn. Bhd.
E-Mail info@aixtron.com

 

DOWNLOAD BROCHURE 


Brochure-G10-GaN.pdf

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Back to product overview 

Sales

Alan Tai
Taiwan/Singapore

Tel: +886 3 571 2678 ext. 101

E-Mail senden

Christof Sommerhalter
USA

Tel: +1 669-228 ext. 3893

E-Mail senden

Christian Geng
Europe

Tel: +49 (2407) 9030 -135

E-Mail senden

Hisatoshi Hagiwara
Japan

Tel: +81 3-5781-0935 ext. 510

E-Mail senden

Nam Kyu Lee
South Korea

Tel: +82 31 371 ext. 3011

E-Mail senden

Wei (William) Song
China

Tel: +86 2164453226 ext. 101

E-Mail senden

Service

AIXTRON SE (Headquarters)

Tel: +49 (2407) 9030-0

AIXTRON 24/7 Technical Support Line

Tel: +49 (2407) 9030-999

AIXTRON Europe

Tel: +49 (2407) 9030-9037

AIXTRON Ltd (UK)

Tel: +44 (1223) 519-444

AIXTRON K.K. (Japan)

Tel: +81 3 5781 0931

AIXTRON Korea Co., Ltd.

Tel: +82 (31) 371-3000

AIXTRON Taiwan Co., Ltd. (Main Office)

Tel: +886 3 571 2678

AIXTRON Inc. (USA)

Tel: +1 (669) 228-3759

Produkte

Vincent Meric
Vice President Marketing

Tel: +49 (0) 2407 9030-9022

E-Mail senden

Karriere

Tom Lankes
Talent Acquisition Expert - Ausbildungsleitung

Tel: +49 (2407) 9030 0

Nachhaltigkeit 

Christoph Pütz
Senior Manager ESG & Sustainability

Tel: +49 (0) 2407 9030-5968

E-Mail senden

Investor Relations

Christian Ludwig
Vice President Investor Relations & Corporate Communications

Tel: +49 (2407) 9030-444

E-Mail senden

Ralf Penner
Senior IR Manager

Tel: +49 (2407) 9030-6153

E-Mail senden

Forschung & Entwicklung

Prof. Dr. Michael Heuken
Vice President Advanced Technologies

Tel: +49 (2407) 9030-335

E-Mail senden

Presse & Öffentlichkeitsarbeit

Christian Ludwig
Vice President Investor Relations & Corporate Communications

Tel: +49 (2407) 9030-444

E-Mail senden

Ersatzteile

Service/Kundendienst