AIXTRON system to be installed at University of Illinois

3x2” Close Coupled Showerhead reactor: based on AIXTRON’s Integrated Concept (IC) for large scale production systems

Aachen/Germany, June 27, 2013 – AIXTRON SE announced that it has delivered a Close Coupled Showerhead (CCS) reactor in the second quarter of 2013 to the University of Illinois at Urbana-Champaign, USA. The 3x2" system will be used for the development of III-V compound semiconductor based materials and devices, including nanowire based solar cells and transistors. AIXTRON received the order in the fourth quarter of 2012.

"We needed a flexible research platform that can support a variety of programs at the University. The critical issues for us are cost of ownership and process flexibility, which is essential for materials research in a multi-user environment,” says Professor Xiuling Li from the Department of Electrical and Computer Engineering and Micro and Nanotechnology Laboratory (MNTL) at Illinois.

The MNTL at Illinois contains more than 8,000 square feet of Class 100 and Class 1000 cleanroom space and recently underwent an US $18 million expansion that added faculty and student office space.

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