Produktübersicht: Verbindungshalbleiter & 2D-Nanomaterialien

Deposition Systems for Compound Semiconductors

G10-GaN

150/200 mm high throughput epitaxy

for GaN power & RF applications

Our product for 150/200 mm GaN epitaxy

G10-GaN

Highest wafer/m² fab area
3 process chamber compact cluster design with
50 % footprint reduction*

Best in class device yield

3x on-wafer uniformity improvement*
at lowest particle level for all wafers
(within run, run-to-run, chamber-to-chamber)

Lowest epi cost/wafer in the market

>25% lower epi cost than any other platform

Planetary Reactor®

Your benefits

Highest wafer yield
Low particle density (~0.1/cm²)
Excellent uniformity (on-wafer, wafer-to-wafer)

Best in class productivity
Outstanding reproducibility
≥90 % equipment uptime
Best in class epi cost
Highest throughput/m² fab
Lowest labor & chemical cost

Our solutions

Fully automated wafer handling (C2C)
Novel wafer carrier design
Individual wafer close loop topside temp. control
Individual control of thickness & composition uniformity by 5-flow injector
Automated chamber cleaning
Long lifetime consumables
Smart system with predictive functionalities
Advanced chamber-to-chamber matching capabilities
Large capacity batch Planetary Reactor®
Compact cluster design with 3 process chambers
Highest chemical efficiency by 5-flow injector
Lowest operator assistance due to 50 wafer capacity on C2C

The best of both worlds

Single wafer performance at lowest batch processing cost

Composition uniformity

On-wafer device uniformity (650V application)

G10-GaN enables seamless process transfer from today‘s tool of record AIX G5+ C

Same cassette-to-cassette wafer handling

„On-board“ calibration and control modes for process matching

Identical process chamber size and wafer configuration

High productivity MOCVD solution for 150/200 mm GaN power & RF applications

Market opportunity

GAN MARKET TRENDS

FAST CHARGER

Source: https://www.digitalcameraworld.com/buying-guides/best-gan-charger

DATA CENTER

Source: https://www.datacenterknowledge.com

SOLAR MICRO INVERTER

Source: https://www.solarreviews.com

Market volume ($M)

Global presence

CHINA AIXTRON China Ltd. Phone +86 (21) 6445 3226 Fax +86 (21) 6445 3742 E-Mail chinainfo@aixtron.com	GERMANY AIXTRON SE Phone +49 (2407) 9030-0 Fax +49 (2407) 9030-40 E-Mail info@aixtron.com
TAIWAN AIXTRON Taiwan Co., Ltd. Phone +886 (3) 571 2678 Fax +886 (3) 571 2738 E-Mail taiwaninfo@aixtron.com	KOREA AIXTRON Korea CO., Ltd. Phone +82 (31) 371 3000 Fax +82 (31) 371 3093 E-Mail koreainfo@aixtron.com
USA AIXTRON Inc. Phone +1 (669) 228 3759 E-Mail usinfo@aixtron.com	UNITED KINGDOM AIXTRON Ltd. Phone +44 (1223) 519 444 Fax +44 (1223) 519 888 E-Mail ukinfo@aixtron.com
JAPAN AIXTRON K.K. Phone +81 (3) 5781 0931 Fax +81 (3) 5781 0940 E-Mail japaninfo@aixtron.com	MALAYSIA AIXTRON Malaysia Sdn. Bhd. E-Mail info@aixtron.com

DOWNLOAD BROCHURE

Brochure-G10-GaN.pdf

B ack to product overview

G10-GaN

Our product for 150/200 mm GaN epitaxy

G10-GaN

Planetary Reactor®

Your benefits

Our solutions

The best of both worlds

Composition uniformity

On-wafer device uniformity (650V application)

G10-GaN enables seamless process transfer from today‘s tool of record AIX G5+ C

High productivity MOCVD solution for 150/200 mm GaN power & RF applications

Market opportunity

GAN MARKET TRENDS

Market volume ($M)

Global presence

DOWNLOAD BROCHURE

Sales

Service

Produkte

Karriere

Nachhaltigkeit

Unternehmen & Investor Relations

Forschung & Entwicklung

Presse & Öffentlichkeitsarbeit

Ersatzteile

G10-GaN

Our product for 150/200 mm GaN epitaxy

G10-GaN

Planetary Reactor®

Your benefits

Our solutions

The best of both worlds

Composition uniformity

On-wafer device uniformity (650V application)

G10-GaN enables seamless process transfer from today‘s tool of record AIX G5+ C

High productivity MOCVD solution for 150/200 mm GaN power & RF applications

Market opportunity

GAN MARKET TRENDS

Market volume ($M)

Global presence

DOWNLOAD BROCHURE

Teilen

Sales

Service

Produkte

Karriere

Nachhaltigkeit

Unternehmen & Investor Relations

Forschung & Entwicklung

Presse & Öffentlichkeitsarbeit

Ersatzteile